An Arrangement of Micrometer-scale Particles on Substrate by Electrified Dots Drawn with a Focused Ion Beam.

Nanoscale ripples on polymers created by a focused ion beam.

We show that focused ion beam irradiation results in the creation of peculiar one- and two-dimensional nanoscale features on the surface of polyimide-a common polymer in electronics, large scale structures, and the automobile industry, as well as in biomedical applications. The role of ion beam incident angle, acceleration voltage, and fluence on the morphology of the structural features is sys...

Focused Ion Beam Lithography

Focused ion beam milling strategy for sub-micrometer holes in silicon

Focused ion beam (FIB) milling can be used as a tool to fabricate structures with sub-micrometer details. The slab material can be silicon, for example, which can then be used as a mould for nano-imprint lithography, or in silicon on insulator (SOI) layer configuration suitable for photonic applications. In the latter, additional effort has to be taken to prevent high FIB induced losses, due to...

Nanometer scale patterning using focused ion beam milling

Publisher's copyright statement: Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in (Petit, D. and Faulkner, C. C. and Johnstone, S. and Wood, D. and Cowburn, R. P. (2005) Nanometer scale patterning using focused ion be...

Wrinkled hard skins on polymers created by focused ion beam.

A stiff skin forms on surface areas of a flat polydimethylsiloxane (PDMS) upon exposure to focused ion beam (FIB) leading to ordered surface wrinkles. By controlling the FIB fluence and area of exposure of the PDMS, one can create a variety of patterns in the wavelengths in the micrometer to submicrometer range, from simple one-dimensional wrinkles to peculiar and complex hierarchical nested wr...